V.S.T. has developed several substrate holders design for interchangeability and fully field upgradable.
When possible the holders are delivered installed on standard vacuum flanges which fits our vacuum chambers substrate holder port flange.
All the electrical connections are similar. The wiring diagrams are similar and allow integrating any of the holders on the system. The PLC recognizes the holder model thanks to key code inside the plug. The PLS software behavior is adapted to the holder model automatically.
Optional features
